TMD 8104 7678 / 81047678, ZnO/AL2O3 2wt% sputtering target, planar target - NEW

TMD planar Sputtering target, 8104 7678

TMD Product No: 81047678
Composition: ZnO/Al2O3 2 wt %
Purity: 99.9 %
Dimension: 2992 x 232 x 14 mm
Backing plate: M10277

Size single plate (LxWxH):
Backing plate: 277,2x99,5x14,5
ZnO/Al2O3: 276,9x111x8,25

application:

• sputtering target and backing plate bonding

features:

• compatible with a wide range of target materials
• highest thermally conductive bond offered
• provides support for fragile target materials
• thorough bond coverage
• malleable solder allows for thermal expansion during sputtering

bonding process:

• accurate allignment of target on backing plane
• target bonding surface may be coated prior to bonding to improve adhesion
• indium reflow process provides complete bond coverage
• bonded target assemblies are cleaned and ready to use in vacuum