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TRUMPF HÜTTINGER 1880203, TruPlasma RF 3020, HF generator
| Article Number: | LW43816 |
| Product Condition: | Used |
| Shipping: | Express delivery available |
| Warranty: | 12 Months |
| Available Stock: | 1 |
TRUMPF Hüttinger GmbH + Co. KG HF generator, 1880203, TruPlasma RF 3020 Model: 1880203... more
Article: "TRUMPF HÜTTINGER 1880203, TruPlasma RF 3020, HF generator"
TRUMPF Hüttinger GmbH + Co. KG HF generator, 1880203, TruPlasma RF 3020 Semiconductor Applications:
Model: 1880203
Type: TruPlasmaRF3020
Condition: Used
Technical Data:
400V-480V
50/60Hz
41.8A-34.5A
20 kW
General:
Features
- Arc Management with innovative Arc Recipe and Arc Counter
- Smart Auto Frequency Tuning
- Best in class wall-plug efficiency of > 80 %
- Highest accuracy and stability down to 1 W
- Patented CombineLine Technology with cable lenght indepency
Technical data
- Output frequency 13.56 MHz
- Sync interfaces
- Analog / digital
- RS 232 / RS 485
- Profibus
- IP 20
- Maximum water pressure 7 bar
- Minimum pressure difference 2 bar
- Minimum flow rate 20 l/min
- Coolant temperature 5 °C – 35 °C
- Overall efficiency > 75 %
- Certificates / standards Semi S2, SEMI F47, UL, CE, RoHs
- Outside temperature 5 °C – 40 °C
- Humidity 5 % – 85 %
- Chemical Vapor Deposition (CVD)
- Atomic Layer Deposition
- Atomic Layer Etch
- Reactive Ion Etching
- Dry Etch Process
- Plasma Enhanced Chemical Vapour Deposition (PECVD)
- CCP and ICP chambers
Important Notice:
The scope of delivery includes only the parts and accessories listed in the item description and shown in the product photos. If you have any questions about the scope of delivery or would like additional photos, please contact us before completing your purchase.
This item was placed on the market before 13 December 2024. It is therefore not subject to the additional labelling requirements under the new EU General Product Safety Regulation (GPSR). If you have any questions, please do not hesitate to contact our customer service team.
All brand names and logos mentioned are the property of their respective rights holders. Lagerwerk GmbH has no direct business relationship with the manufacturers listed on this website and does not act as their authorised dealer or representative.
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