ASYST Spartan EFEM, Sorter, Brooks, Wafer Front-End Module, 300mm

预览: BROOKS ASYST Spartan EFEM, Sorter, Wafer Front-End Module, 300mm

BROOKS ASYST Spartan EFEM, Sorter, Wafer Front-End Module, 300mm

Bruttopreis $ 72,989.57

$ 61,335.77 *

另加增值税另加运费

可立即发货，交货时间约1-3工作日

商品编号:	LW43278
Product Condition:	Used
Shipping:	Express delivery available
Warranty:	12个月
Available Stock:	1

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Brooks Automation Wafer Front-End Module, 300mm, ASYST Spartan EFEM, Sorter Model:... 更多

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产品信息 "BROOKS ASYST Spartan EFEM, Sorter, Wafer Front-End Module, 300mm"

Brooks Automation Wafer Front-End Module, 300mm, ASYST Spartan EFEM, Sorter

Model: ASYSTSpartanEFEM

Type: Sorter

Condition: Used

Technical Data:

100-240V AC

50/60Hz

10A

General:

300 mm EFEM with 3 load ports, clean room mini-environment and integrated wafer transfer robot

This device is an Equipment Front End Module (EFEM) from the ASYST Spartan series, developed for the fully automated handling of 300 mm silicon wafers in semiconductor manufacturing.

It has three load ports, a mini environment with ULPA air filters, internal lighting, comprehensive safety controls and all the necessary interfaces for system integration.

In addition, a fully integrated wafer transfer robot is installed, which removes wafers from the FOUP/cassette load ports, separates them and transfers them precisely to subsequent process modules.

Year of manufacture: 27 December 2010

Includes CD with operating, service and installation manuals (9701-3060-01 Rev G)

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