ASYST Spartan EFEM, Sorter, Brooks, Wafer Front-End Module, 300mm

Vorschau: BROOKS ASYST Spartan EFEM, Sorter, Wafer Front-End Module, 300mm

BROOKS ASYST Spartan EFEM, Sorter, Wafer Front-End Module, 300mm

Bruttopreis 74486٫98

62594٫10 *

Preise zzgl. gesetzlicher MwSt. zzgl. Versandkosten

immediately available

Artikel-Nr.:	LW43278
Product Condition:	Used
Shipping:	Express delivery available
Warranty:	12 شهراً
Available Stock:	1

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Artikel: "BROOKS ASYST Spartan EFEM, Sorter, Wafer Front-End Module, 300mm"

Brooks Automation Wafer Front-End Module, 300mm, ASYST Spartan EFEM, Sorter

Model: ASYSTSpartanEFEM

Type: Sorter

Condition: Used

Technical Data:

100-240V AC

50/60Hz

10A

General:

300 mm EFEM with 3 load ports, clean room mini-environment and integrated wafer transfer robot

This device is an Equipment Front End Module (EFEM) from the ASYST Spartan series, developed for the fully automated handling of 300 mm silicon wafers in semiconductor manufacturing.

It has three load ports, a mini environment with ULPA air filters, internal lighting, comprehensive safety controls and all the necessary interfaces for system integration.

In addition, a fully integrated wafer transfer robot is installed, which removes wafers from the FOUP/cassette load ports, separates them and transfers them precisely to subsequent process modules.

Year of manufacture: 27 December 2010

Includes CD with operating, service and installation manuals (9701-3060-01 Rev G)

Wichtige Hinweise:
The scope of delivery includes only the parts and accessories listed in the item description and shown in the product photos. If you have any questions about the scope of delivery or would like additional photos, please contact us before completing your purchase.

This item was placed on the market before 13 December 2024. It is therefore not subject to the additional labelling requirements under the new EU General Product Safety Regulation (GPSR). If you have any questions, please do not hesitate to contact our customer service team.

All brand names and logos mentioned are the property of their respective rights holders. Lagerwerk GmbH has no direct business relationship with the manufacturers listed on this website and does not act as their authorised dealer or representative.

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